MOEMS micro-opto-electro-mechanical systems
| Other Authors: | |
|---|---|
| Format: | Book |
| Published: |
Bellingham, WA :
SPIE--The International Society for Optical Engineering
c2005.
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| Subjects: | |
| See on Universidad de Navarra: | https://unika.unav.edu/discovery/fulldisplay?docid=alma991002728859708016&context=L&vid=34UNAV_INST:VU1&search_scope=34UNAV_TODO&tab=34UNAV_TODO&lang=es |
| Physical Description: | 614 p. : SPIE PRESS ; 2005 |
|---|---|
| ISBN: | 9780819450210 |
