MOEMS micro-opto-electro-mechanical systems
| Otros Autores: | |
|---|---|
| Formato: | Libro |
| Publicado: |
Bellingham, WA :
SPIE--The International Society for Optical Engineering
c2005.
|
| Materias: | |
| Ver en Universidad de Navarra: | https://unika.unav.edu/discovery/fulldisplay?docid=alma991002728859708016&context=L&vid=34UNAV_INST:VU1&search_scope=34UNAV_TODO&tab=34UNAV_TODO&lang=es |
| Descripción Física: | 614 p. : SPIE PRESS ; 2005 |
|---|---|
| ISBN: | 9780819450210 |
