Nano- and microelectromechanical systems fundamentals of nano- and microengineering
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| Formato: | Libro |
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Boca Raton :
CRC Press
c2001.
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| Colección: | Nano- and microscience, engineering, technology, and medicine series
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| Ver en Universidad de Navarra: | https://unika.unav.edu/discovery/fulldisplay?docid=alma991002682919708016&context=L&vid=34UNAV_INST:VU1&search_scope=34UNAV_TODO&tab=34UNAV_TODO&lang=es |
