Nano- and microelectromechanical systems fundamentals of nano- and microengineering
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| Format: | Book |
| Published: |
Boca Raton :
CRC Press
c2001.
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| Series: | Nano- and microscience, engineering, technology, and medicine series
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| Subjects: | |
| See on Universidad de Navarra: | https://unika.unav.edu/discovery/fulldisplay?docid=alma991002682919708016&context=L&vid=34UNAV_INST:VU1&search_scope=34UNAV_TODO&tab=34UNAV_TODO&lang=es |
| Physical Description: | 338 p. : il. ; 25 cm |
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