Handbook of microlithography, micromachining, and microfabrication. Vol 2: Micromachining and microfabrication

Handbook of microlithography, micromachining, and microfabrication Vol 2: Micromachining and microfabrication Vol 2: Micromachining and microfabrication /

Bibliographic Details
Main Author: Rai-Choudhury, P. (-)
Format: Book
Language:Inglés
Published: London : Institution of Electrical Engineers 1997
Edition:1a ed
Series:IEE Materials and Devices series 12B
Subjects:
Electrónica > Microelectrónica
See on Universidad de Navarra:https://unika.unav.edu/discovery/fulldisplay?docid=alma991002357359708016&context=L&vid=34UNAV_INST:VU1&search_scope=34UNAV_TODO&tab=34UNAV_TODO&lang=es
Description
Physical Description:692 p. 26 cm
ISBN:9780852969113

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