Handbook of microlithography, micromachining, and microfabrication Vol.: 1 Microlitthography Vol.: 1 Microlitthography /
| Main Author: | |
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| Format: | Book |
| Language: | Inglés |
| Published: |
Londres :
Institution of Electrical Engineers
1997
|
| Edition: | 1a ed |
| Series: | IEE Materials and Devices serie 12
|
| Subjects: | |
| See on Universidad de Navarra: | https://unika.unav.edu/discovery/fulldisplay?docid=alma991002343299708016&context=L&vid=34UNAV_INST:VU1&search_scope=34UNAV_TODO&tab=34UNAV_TODO&lang=es |
| Physical Description: | 768 p. 26 cm |
|---|---|
| ISBN: | 9780852969069 |
