Mack, C. A. (2006). Field guide to optical lithography. SPIE Press.
Chicago Style (17th ed.) CitationMack, Chris A. Field Guide to Optical Lithography. Washington. USA.: SPIE Press, 2006.
MLA (9th ed.) CitationMack, Chris A. Field Guide to Optical Lithography. SPIE Press, 2006.
Warning: These citations may not always be 100% accurate.