APA (7th ed.) Citation

Mack, C. A. (2006). Field guide to optical lithography. SPIE Press.

Chicago Style (17th ed.) Citation

Mack, Chris A. Field Guide to Optical Lithography. Washington. USA.: SPIE Press, 2006.

MLA (9th ed.) Citation

Mack, Chris A. Field Guide to Optical Lithography. SPIE Press, 2006.

Warning: These citations may not always be 100% accurate.