Kaariainen, T. (2013). Atomic layer deposition: Principles, characteristics, and nanotechnology applications (2nd ed.). John Wiley & Sons.
Chicago Style (17th ed.) CitationKaariainen, Tommi. Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications. 2nd ed. Hoboken, NJ: John Wiley & Sons, 2013.
MLA (9th ed.) CitationKaariainen, Tommi. Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications. 2nd ed. John Wiley & Sons, 2013.
Warning: These citations may not always be 100% accurate.