Mechanical microsensors

Bibliographic Details
Main Author: Elwenspoek, M. 1948- (-)
Other Authors: Wiegerink, Remco J., 1964-
Format: Book
Language:Inglés
Published: Berlin [etc.] : Springer 2000.
Series:Microtechnology and MEMS
Subjects:
See on Universidad de Deusto:https://oceano.biblioteca.deusto.es/primo-explore/search?query=any,contains,991000450899703351&tab=default_tab&search_scope=deusto_alma&vid=deusto
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Description
Physical Description:X, 295 p. : gráf. ; 24 cm
Bibliography:Bibliogr.: p. [274]-290
ISBN:9783540675822