Thin film analysis by X-ray scattering
With contributions by Paul F. Fewster and Christoph GenzelWhile X-ray diffraction investigation of powders and polycrystalline matter was at the forefront of materials science in the 1960s and 70s, high-tech applications at the beginning of the 21st century are driven by the materials science of thi...
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| Otros Autores: | , |
| Formato: | Libro electrónico |
| Idioma: | Inglés |
| Publicado: |
Weinheim :
Wiley-VCH
c2006.
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| Materias: | |
| Ver en Biblioteca Universitat Ramon Llull: | https://discovery.url.edu/permalink/34CSUC_URL/1im36ta/alma991009665111506719 |
Tabla de Contenidos:
- Thin Film Analysis by X-Ray Scattering; Table of Contents; Preface; Symbols; 1 Principles of X-ray Diffraction; 1.1 The Basic Phenomenon; 1.2 The θ/2θ Scan; 1.3 Intensity of Bragg Reflections; 1.3.1 Atomic Form Factors; 1.3.2 Structure Factor; 1.3.3 Multiplicity; 1.3.4 Geometry Factor; 1.3.5 Preferred Orientation (Texture); 1.3.6 Polarization Factor; 1.3.7 Absorption Factor; 1.3.8 Integration of the Interference Function; 1.4 Applications; Exercises; References; 2 Identification of Chemical Phases; 2.1 Histogram-Based Techniques; 2.2 Linear Attenuation Coefficient μ
- 2.3 Determination and Interpretation of the μt Product2.4 Analysis of Phase Mixtures; 2.5 Amorphous Thin Films; 2.6 Accurate Determination of Lattice Parameter; 2.7 Applications; Exercises; References; 3 Line Profile Analysis; 3.1 Model Functions and Peak Parameters; 3.2 Instrumental Line Profile; 3.3 Deconvolution by Fourier Techniques; 3.4 Reflection Broadening by Small Crystallite Size Only; 3.4.1 Scherrer Equation; 3.4.2 Column Height Distribution; 3.4.3 Crystallite Shapes Other Than Cubes; 3.4.4 Determination of the Column Height Distribution Function
- 3.4.5 Determination of the Crystallite Size Distribution Function3.5 Concomitant Occurrence of Size and Strain Broadening; 3.5.1 Analysis According to Williamson and Hall; 3.5.2 Method of Warren and Averbach; 3.5.3 Single-Line Analysis; 3.5.4 Techniques of Whole-Pattern Fitting; 3.6 Applications; Exercises; References; 4 Grazing Incidence Configurations; 4.1 Grazing Incidence X-ray Diffraction (GIXRD); 4.2 Penetration Depth and Information Depth; 4.3 Depth-Dependent Properties; 4.4 Refractive Index for X-rays; 4.5 Total External Reflection and Critical Angle; 4.6 X-ray Reflectivity (XRR)
- 4.6.1 Reflectivity of a Substrate4.6.2 Reflectivity of a Single Layer; 4.6.3 Reflectivity of Multilayers and Superlattices; 4.7 Grazing Incidence Diffraction (GID); 4.8 Applications; Exercises; References; 5 Texture and Preferred Orientation; 5.1 Texture Factors; 5.2 Pole Figures; 5.3 Measurement of Pole Figures; 5.4 Directions, Orientations and Inverse Pole Figures; 5.5 Fiber Textures or Layer Textures; 5.5.1 Harmonic Method; 5.5.2 Whole Pattern Techniques; 5.5.3 Rocking Curves (ω Scans); 5.6 Biaxial and Fully General Textures; 5.6.1 Azimuthal Scans (Φ Scans)
- 5.6.2 General Orientation Distribution5.6.3 Determination of Fully General Texture; 5.7 Depth Dependence of Thin-Film Textures; 5.8 Applications; Exercises; References; 6 Residual Stress Analysis; 6.1 Ceiiinnosssttuv; 6.2 Fundamental Equation of XSA; 6.3 Measurement of d(ψ) Distributions; 6.4 Diffraction Elastic Constants (DECs) s(1) and 1/2s(2); 6.5 Grain Interaction Models; 6.6 The Effect of Texture; 6.7 Classification of Stresses; 6.7.1 Classification by Dimension; 6.7.2 Residual Stresses in Multiphase Materials; 6.7.3 Origin of Residual Stresses: Extrinsic and Intrinsic Stresses
- 6.8 Effect of Residual Stress Gradients
