High-speed surface profilometry based on an adaptive microscope with axial chromatic encoding

An adaptive microscope with axial chromatic encoding is designed and developed, namely the AdaScope. With the ability to confocally address any locations within the measurement volume, the AdaScope provides the hardware foundation for a cascade measurement strategy to be developed, dramatically acce...

Descripción completa

Detalles Bibliográficos
Otros Autores: Luo, Ding (auth)
Formato: Libro electrónico
Idioma:Inglés
Publicado: Karlsruhe KIT Scientific Publishing 2021
Colección:Schriftenreihe Automatische Sichtprüfung und Bildverarbeitung
Materias:
Ver en Biblioteca Universitat Ramon Llull:https://discovery.url.edu/permalink/34CSUC_URL/1im36ta/alma991009654088606719
Descripción
Sumario:An adaptive microscope with axial chromatic encoding is designed and developed, namely the AdaScope. With the ability to confocally address any locations within the measurement volume, the AdaScope provides the hardware foundation for a cascade measurement strategy to be developed, dramatically accelerating the speed of 3D confocal microscopy.
Descripción Física:1 electronic resource (202 p.)