Handbook of silicon based MEMS materials and technologies
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS materialMaterial properties and measurement techniquesAnalytical methods used in mat...
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| Formato: | Libro electrónico |
| Idioma: | Inglés |
| Publicado: |
Amsterdam ; Boston :
William Andrew/Elsevier
2010.
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| Edición: | 1st ed |
| Colección: | Micro & nano technologies.
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| Ver en Biblioteca Universitat Ramon Llull: | https://discovery.url.edu/permalink/34CSUC_URL/1im36ta/alma991009629689606719 |
