Handbook of silicon based MEMS materials and technologies
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS materialMaterial properties and measurement techniquesAnalytical methods used in mat...
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| Formato: | Libro electrónico |
| Idioma: | Inglés |
| Publicado: |
Amsterdam ; Boston :
William Andrew/Elsevier
2010.
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| Edición: | 1st ed |
| Colección: | Micro & nano technologies.
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| Ver en Biblioteca Universitat Ramon Llull: | https://discovery.url.edu/permalink/34CSUC_URL/1im36ta/alma991009629689606719 |
| Sumario: | A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS materialMaterial properties and measurement techniquesAnalytical methods used in materials characterizationModeling in MEMSMeasuring MEMSMicromachining technologies in MEMSEncapsulation of MEMS componentsEmerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well |
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| Notas: | Description based upon print version of record. |
| Descripción Física: | 1 online resource (669 p.) |
| Bibliografía: | Includes bibliographical references and index. |
| ISBN: | 9780815519881 9786612541148 9780080947723 9781282541146 |
