In-situ characterization of thin film growth
Advanced techniques for characterizing thin film growth in situ help to develop improved understanding and faster diagnosis of issues with the process. In situ characterization of thin film growth reviews current and developing techniques for characterizing the growth of thin films, covering an impo...
| Other Authors: | , |
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| Format: | eBook |
| Language: | Inglés |
| Published: |
Cambridge ; Philadelphia, Pa. :
Woodhead Pub
2011.
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| Edition: | 1st edition |
| Series: | Woodhead Publishing Series in Electronic and Optical Materials
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| Subjects: | |
| See on Biblioteca Universitat Ramon Llull: | https://discovery.url.edu/permalink/34CSUC_URL/1im36ta/alma991009628227806719 |
