Characterization in silicon processing : editor, Yale Strusser [and three others] ; design, Christopher Simon ; contributors, Roc Blumenthal [and sixteen others]

Characterization in silicon processing editor, Yale Strusser [and three others] ; design, Christopher Simon ; contributors, Roc Blumenthal [and sixteen others]

This volume is devoted to the consideration of the use use of surface, thin film and interface characterization tools in support of silicon-based semiconductor processing. The approach taken is to consider each of the types of films used in silicon devices individually in its own chapter and to disc...

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Detalles Bibliográficos
Otros Autores: Strausser, Yale, author (author), Strausser, Yale, editor (editor), Simon, Christopher, book designer (book designer), Blumenthal, Roc, contributor (contributor)
Formato: Libro electrónico
Idioma:Inglés
Publicado: Stoneham, Massachusetts ; Greenwich, Connecticut : Butterworth-Heinemann 1993.
Edición:1st edition
Colección:Materials characterization series.
Materias:
Silicon.
Electric conductors.
Semiconductor films.
Surface chemistry.
Ver en Biblioteca Universitat Ramon Llull:https://discovery.url.edu/permalink/34CSUC_URL/1im36ta/alma991009627934406719

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