Ion Implantation

Ion implantation presents a continuously evolving technology. While the benefits of ion implantation are well recognized for many commercial endeavors, there have been recent developments in this field. Improvements in equipment, understanding of beam-solid interactions, applications to new material...

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Bibliographic Details
Other Authors: Mark Goorsky (auth), Goorsky, Mark, editor (editor)
Format: eBook
Language:Inglés
Published: London, England : IntechOpen 2012
2012.
Subjects:
See on Biblioteca Universitat Ramon Llull:https://discovery.url.edu/permalink/34CSUC_URL/1im36ta/alma991009427349106719

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