Handbook of microlithography, micromachining, and microfabrication
| Corporate Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Book |
| Language: | Inglés |
| Published: |
Bellingham, Wash. : London :
SPIE Optical Engineering Press ; Institution of Electrical Engineers
cop. 1997
|
| Series: | IEE materials and devices series ;
12A, 12B |
| Subjects: | |
| See on Biblioteca Universitat Ramon Llull: | https://discovery.url.edu/permalink/34CSUC_URL/1im36ta/alma991006887419706719 |
Table of Contents:
- Conté: V. 1. Microlithography. V. 2. Micromachining and microfabrication
