APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Institution of Electrical Engineers, & Rai-Choudhury, P. (1997). Handbook of microlithography, micromachining, and microfabrication. SPIE Optical Engineering Press ; Institution of Electrical Engineers.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Institution of Electrical Engineers, and P. Rai-Choudhury. Handbook of Microlithography, Micromachining, and Microfabrication. Bellingham, Wash. : London: SPIE Optical Engineering Press ; Institution of Electrical Engineers, 1997.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. Handbook of Microlithography, Micromachining, and Microfabrication. SPIE Optical Engineering Press ; Institution of Electrical Engineers, 1997.