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Tabla de Contenidos: “…20.2 FIB for Direct Milling and Deposition of Structures -- 20.3 SEM for Direct Deposition or Lithography of Structures -- 20.4 DualBeam Applications of FA and Characterization of MEMS Devices -- Reference -- Chapter 21 Oxygen and Bulk Microdefects in Silicon -- 21.1 Measuring Oxygen in Silicon -- 21.2 Measuring Bulk Microdefects -- References -- PART IV: Micromachining Technologies in MEMS -- Chapter 22 MEMS Lithography -- 22.1 Lithography Considerations Before Wafer Processing -- 22.2 Wafers in Lithography Process -- 22.3 Processing After Lithography -- 22.4 Thick Photoresist Lithography -- References -- Chapter 23 Deep Reactive Ion Etching -- 23.1 Etch Chemistries -- 23.2 Equipment -- 23.3 DRIE Processes -- 23.4 DRIE Advanced Issues and Challenges -- 23.5 DRIE Applications -- 23.6 Post-DRIE Etch Treatments -- 23.7 Choosing between Wet and Dry Etching -- References -- Chapter 24 Wet Etching of Silicon -- 24.1 Basic Description of Anisotropic Etching: Faceting -- 24.2 Beyond Faceting: Atomistic Phenomena -- 24.3 Beyond Atomistics: Electrochemistry -- 24.4 Typical Surface Morphologies (I. Zubel and M.A. Gosálvez) -- 24.5 Effects from Silicon Wafer Features (E. …”

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