Tabla de Contenidos: “…PROCESOS DE CVD Y PECVD A BAJA PRESIÓN -- DEPOSICIÓN QUÍMICA EN FASE VAPOR ASISTIDA POR PLASMA -- DEPOSICIÓN ATÓMICA DE CAPAS (ALD) Y DEPOSICIÓN DE NANOCAPAS (NLD) -- CAPÍTULO 11. …”

“…To this aim, important process innovations, such as spatial ALD, direct liquid injection CVD, and electron cyclotron resonance CVD, are presented. …”

“…Atomic layer deposition (ALD) is a thin film deposition process renowned for its ability to produce layers with unrivaled control of thickness and composition, conformability to extreme three-dimensional structures, and versatility in the materials it can produce. …”

Tabla de Contenidos: “…«¡BENDITO SEA EL TODOPODEROSO ALD!» -- 10.3. LOS AGARENOS -- 11. SABIDURÍA -- 11.1. …”

“…Recently, new wide-band energy gap semiconductors can be grown by ALD, PLD, sputtering, or MOCVD. They have great potential for the fabrication and application to TFTs. …”

“…The authors explore the atomic layer deposition (ALD) technique, summarize the advancements in the fundamental understanding of the most successful Nafion membranes, and focus on the development of alternative and composite membranes for direct alcohol fuel cells (DAFCs). …”