Nishi, Y., Doering, R., & Wooldrige, T. (2000). Handbook of Semiconductor Manufacturing Technology. Marcel Dekker, Inc.
Cita Chicago Style (17a ed.)Nishi, Yoshio, Robert Doering, y Tim Wooldrige. Handbook of Semiconductor Manufacturing Technology. New York: Marcel Dekker, Inc, 2000.
Cita MLA (9a ed.)Nishi, Yoshio, et al. Handbook of Semiconductor Manufacturing Technology. Marcel Dekker, Inc, 2000.
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