Handbook of microlithography, micromachining, and microfabrication Vol 2: Micromachining and microfabrication Vol 2: Micromachining and microfabrication /
| Autor principal: | |
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| Formato: | Libro |
| Idioma: | Inglés |
| Publicado: |
London :
Institution of Electrical Engineers
1997
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| Edición: | 1a ed |
| Colección: | IEE Materials and Devices series 12B
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| Materias: | |
| Ver en Universidad de Navarra: | https://unika.unav.edu/discovery/fulldisplay?docid=alma991002357359708016&context=L&vid=34UNAV_INST:VU1&search_scope=34UNAV_TODO&tab=34UNAV_TODO&lang=es |
| Descripción Física: | 692 p. 26 cm |
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| ISBN: | 9780852969113 |
