Vlsi metallization: Physics and technologies
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | Inglés |
| Published: |
Boston :
Artech House Books
1991
|
| Edition: | 1a ed |
| Subjects: | |
| See on Universidad de Navarra: | https://unika.unav.edu/discovery/fulldisplay?docid=alma991001679009708016&context=L&vid=34UNAV_INST:VU1&search_scope=34UNAV_TODO&tab=34UNAV_TODO&lang=es |
| Physical Description: | 529 p. |
|---|---|
| ISBN: | 9780890065013 |
