APA (7th ed.) Citation

Shenai, K. (1991). Vlsi metallization: Physics and technologies (1a ed.). Artech House Books.

Chicago Style (17th ed.) Citation

Shenai, Krishna. Vlsi Metallization: Physics and Technologies. 1a ed. Boston: Artech House Books, 1991.

MLA (9th ed.) Citation

Shenai, Krishna. Vlsi Metallization: Physics and Technologies. 1a ed. Artech House Books, 1991.

Warning: These citations may not always be 100% accurate.