The physics of micro/nano-Fabrication
| Main Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | Inglés |
| Published: |
New York :
Plenum Publishing Corporation
1992
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| Edition: | 1a ed |
| Subjects: | |
| See on Universidad de Navarra: | https://unika.unav.edu/discovery/fulldisplay?docid=alma991001572549708016&context=L&vid=34UNAV_INST:VU1&search_scope=34UNAV_TODO&tab=34UNAV_TODO&lang=es |
| Physical Description: | 650 p. |
|---|---|
| ISBN: | 9780306441462 |
