APA (7th ed.) Citation

Brodie, I., & Muray, J. J. (1992). The physics of micro/nano-Fabrication (1a ed.). Plenum Publishing Corporation.

Chicago Style (17th ed.) Citation

Brodie, Ivor, and Julius J. Muray. The Physics of Micro/nano-Fabrication. 1a ed. New York: Plenum Publishing Corporation, 1992.

MLA (9th ed.) Citation

Brodie, Ivor, and Julius J. Muray. The Physics of Micro/nano-Fabrication. 1a ed. Plenum Publishing Corporation, 1992.