Cita APA (7a ed.)

Moreau, W. M. (1991). Semiconductor lithography principles practices and materials (1a ed.). Plenum Publishing Corporation.

Cita Chicago Style (17a ed.)

Moreau, Wayne M. Semiconductor Lithography Principles Practices and Materials. 1a ed. New York: Plenum Publishing Corporation, 1991.

Cita MLA (9a ed.)

Moreau, Wayne M. Semiconductor Lithography Principles Practices and Materials. 1a ed. Plenum Publishing Corporation, 1991.