Silicon Processing for the VLSI ERA : Vol 2: Process Integration

Bibliographic Details
Main Author: Wolf, Stanley (-)
Format: Book
Language:Inglés
Published: Sunset Beach (California) : Lattice Press 1990
Subjects:
See on Universidad de Navarra:https://unika.unav.edu/discovery/fulldisplay?docid=alma991001209049708016&context=L&vid=34UNAV_INST:VU1&search_scope=34UNAV_TODO&tab=34UNAV_TODO&lang=es
Description
Physical Description:753 p. ; 24 cm