Wolf, S. (1990). Silicon Processing for the VLSI ERA: : Vol 2: Process Integration. Lattice Press.
Chicago Style (17th ed.) CitationWolf, Stanley. Silicon Processing for the VLSI ERA: : Vol 2: Process Integration. Sunset Beach (California): Lattice Press, 1990.
MLA (9th ed.) CitationWolf, Stanley. Silicon Processing for the VLSI ERA: : Vol 2: Process Integration. Lattice Press, 1990.
Warning: These citations may not always be 100% accurate.