Fundamentals of microfabrication and nanotechnology Volume III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications Volume III :

Bibliographic Details
Other Authors:	Madou, Marc J., author (author)
Format:	eBook
Language:	Inglés
Published:	Boca Raton, Florida ; London, [England] ; New York : CRC Press 2011.
Edition:	Third edition
Subjects:	Microelectromechanical systems. Nanoelectromechanical systems. Microfluidics. Solid state physics. Electronic books.
Online Access:	https://recursos.uloyola.es/login?url=https://accedys.uloyola.es:8443/accedix0/sitios/ebook.php?id=141910
See on Universidad Loyola - Universidad Loyola Granada:	https://colectivo.uloyola.es/Record/ELB141910

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Description
Physical Description:	1 online resource (642 pages) : illustrations (some color), tables
Bibliography:	Includes bibliographical references at the end of each chapters.
ISBN:	9781439895245

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