APA (7th ed.) Citation

Madou, M. J. (2011). Fundamentals of microfabrication and nanotechnology: Volume III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications (Third edition.). CRC Press.

Chicago Style (17th ed.) Citation

Madou, Marc J. Fundamentals of Microfabrication and Nanotechnology: Volume III : From MEMS to Bio-MEMS and Bio-NEMS : Manufacturing Techniques and Applications. Third edition. Boca Raton, Florida ; London, [England] ; New York: CRC Press, 2011.

MLA (9th ed.) Citation

Madou, Marc J. Fundamentals of Microfabrication and Nanotechnology: Volume III : From MEMS to Bio-MEMS and Bio-NEMS : Manufacturing Techniques and Applications. Third edition. CRC Press, 2011.