Runyan, W. R., & Bean, K. E. (1990). Semiconductor integrated circuit processing technology. Addison-Wesley.
Cita Chicago Style (17a ed.)Runyan, W. R., y Kenneth E. Bean. Semiconductor Integrated Circuit Processing Technology. Reading, Massachusetts [etc.]: Addison-Wesley, 1990.
Cita MLA (9a ed.)Runyan, W. R., y Kenneth E. Bean. Semiconductor Integrated Circuit Processing Technology. Addison-Wesley, 1990.
Precaución: Estas citas no son 100% exactas.