Chemicals Vapour Deposition in the Semiconductor Industry
This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used as chemical vapour deposition (CVD) precursors in the semiconductor industry. The document presents standard approaches for estimating environmental releases...
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| Format: | eBook |
| Language: | Inglés |
| Published: |
Paris :
OECD Publishing
2015.
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| Series: | Series on Emission Scenario Documents,
no.35. |
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| See on Biblioteca Universitat Ramon Llull: | https://discovery.url.edu/permalink/34CSUC_URL/1im36ta/alma991009704582206719 |
| Summary: | This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used as chemical vapour deposition (CVD) precursors in the semiconductor industry. The document presents standard approaches for estimating environmental releases and occupational exposures, and discusses the typical engineering controls used to mitigate exposure to CVD precursors. |
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| Physical Description: | 1 online resource (80 p.) |
| ISBN: | 9789264502437 |
