Organisation for Economic Co-operation and Development. (2015). Chemicals Vapour Deposition in the Semiconductor Industry. OECD Publishing.
Chicago Style (17th ed.) CitationOrganisation for Economic Co-operation and Development. Chemicals Vapour Deposition in the Semiconductor Industry. Paris: OECD Publishing, 2015.
MLA (9th ed.) CitationOrganisation for Economic Co-operation and Development. Chemicals Vapour Deposition in the Semiconductor Industry. OECD Publishing, 2015.
Warning: These citations may not always be 100% accurate.