MEMS cost analysis from laboratory to industry
This volume demonstrates show cost analysis can be adapted to MEMS, taking into account the wide range of processes and equipment, the major differences with the established semiconductor industry, and the presence of both large-scale, product-orientated manufacturers and small- and medium-scale fou...
| Otros Autores: | |
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| Formato: | Libro electrónico |
| Idioma: | Inglés |
| Publicado: |
Boca Raton, FL :
CRC Press
[2013]
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| Materias: | |
| Ver en Biblioteca Universitat Ramon Llull: | https://discovery.url.edu/permalink/34CSUC_URL/1im36ta/alma991009633563206719 |
Tabla de Contenidos:
- Front Cover; Contents; Preface; Acknowledgements; Chapter 1 The World of MEMS; Chapter 2 Basic Fabrication Processes; Chapter 3 Surface Micromachining; Chapter 4 High-Aspect-Ratio Micromachining; Chapter 5 MEMS Testing; Chapter 6 MEMS Packaging; Chapter 7 Clean Rooms, Buildings and Plant; Chapter 8 The MEMSCOST Spreadsheet; Chapter 9 Product Costs: Accelerometers; Chapter 10 Product Costs: Microphones; Chapter 11 MEMS Foundries; Chapter 12 Financial Reporting and Analysis; Chapter 13 Conclusions; Back Cover
