Introduction to optical metrology

Introduction to optical metrology

Introduction to Optical Metrology examines the theory and practice of various measurement methodologies utilizing the wave nature of light. The book begins by introducing the subject of optics, and then addresses the propagation of laser beams through free space and optical systems. After explaining...

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Bibliographic Details
Corporate Author: CRC Press (-)
Other Authors: Sirohi, Rajpal S., author (author)
Format: eBook
Language:Inglés
Published: Boca Raton, FL : CRC Press 2015.
Edition:1st edition
Series:Optical sciences and applications of light.
Subjects:
Optical measurements.
Metrology.
Wave theory of light.
See on Biblioteca Universitat Ramon Llull:https://discovery.url.edu/permalink/34CSUC_URL/1im36ta/alma991009631657706719
Table of Contents:
  • chapter 1 Introduction to Optics
  • chapter 2 Laser Beams
  • chapter 3 Sources, Detectors, and Recording Media
  • chapter 4 Interferometry
  • chapter 5 Techniques
  • chapter 6 Length Measurement
  • chapter 7 Measurement of Radius of Curvature and Focal Length
  • chapter 8 Optical Testing
  • chapter 9 Angle Measurement
  • chapter 10 Thickness Measurement
  • chapter 11 Measurement of Velocity
  • chapter 12 Pressure Measurement
  • chapter 13 Fiber Optic- and MEM-Based Measurements
  • chapter 14 Length Measurement.

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