Materials processing by cluster ion beams : history, technology, and applications

Materials processing by cluster ion beams history, technology, and applications

Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing. Written by the originator of the gas cluster ion beam (GCIB) concept, this b...

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Detalles Bibliográficos
Otros Autores: Yamada, I. author (author)
Formato: Libro electrónico
Idioma:Inglés
Publicado: Boca Raton, Florida : CRC Press [2016]
Edición:1st edition
Materias:
Ion bombardment.
Ion implantation.
Materials > Effect of radiation on.
Ver en Biblioteca Universitat Ramon Llull:https://discovery.url.edu/permalink/34CSUC_URL/1im36ta/alma991009629695106719
Tabla de Contenidos:
  • chapter 1. Ion beam technology : overview and history
  • chapter 2. History and milestones of cluster beam development
  • chapter 3. Development of cluster beam sources for solid materials
  • chapter 4. Gas cluster ion beam equipment
  • chapter 5. Cluster ion-solid surface interaction kinetics
  • chapter 6. Cluster ion beam sputtering
  • chapter 7. Cluster ion implantation
  • chapter 8. Cluster ion beam-assisted deposition
  • chapter 9. Applications
  • chapter 10. Conclusions.

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