Developments in surface contamination and cleaning Volume 8 : cleaning techniques Volume 8 :
As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a w...
| Other Authors: | , , |
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| Format: | eBook |
| Language: | Inglés |
| Published: |
Oxford, England ; Waltham, Massachusetts :
William Andrew
2015.
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| Edition: | 1st edition |
| Series: | Developments in Surface Contamination and Cleaning Series ;
Volume 8 |
| Subjects: | |
| See on Biblioteca Universitat Ramon Llull: | https://discovery.url.edu/permalink/34CSUC_URL/1im36ta/alma991009629474806719 |
| Summary: | As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. Several novel wet a |
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| Item Description: | Description based upon print version of record. |
| Physical Description: | 1 online resource (235 p.) |
| Bibliography: | Includes bibliographical references at the end of each chapters and index. |
| ISBN: | 9780323312714 |
