Developments in surface contamination and cleaning Volume 8 : cleaning techniques Volume 8 :
As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a w...
| Other Authors: | , , |
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| Format: | eBook |
| Language: | Inglés |
| Published: |
Oxford, England ; Waltham, Massachusetts :
William Andrew
2015.
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| Edition: | 1st edition |
| Series: | Developments in Surface Contamination and Cleaning Series ;
Volume 8 |
| Subjects: | |
| See on Biblioteca Universitat Ramon Llull: | https://discovery.url.edu/permalink/34CSUC_URL/1im36ta/alma991009629474806719 |
