Developments in surface contamination and cleaning. Volume 7 : cleanliness validation and verification

Developments in surface contamination and cleaning Volume 7 : cleanliness validation and verification Volume 7 :

As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning...

Descripción completa

Detalles Bibliográficos
Otros Autores: Kohli, Rajiv, 1947- author (author), Kohli, Rajiv, editor (editor), Mittal, K. L., editor (contributor), Albert, David E., contributor
Formato: Libro electrónico
Idioma:Inglés
Publicado: Kidlington, England ; Waltham, Massachusetts : William Andrew 2015.
Edición:First edition
Materias:
Surfaces (Technology)
Surface contamination > Prevention.
Ver en Biblioteca Universitat Ramon Llull:https://discovery.url.edu/permalink/34CSUC_URL/1im36ta/alma991009629474106719

Ejemplares similares

Ejemplares similares