APA (7th ed.) Citation

Reinhardt, K. A., & Reidy, R. F. (2011). Handbook of cleaning for semiconductor manufacturing: Fundamentals and applications (1st edition.). John Wiley & Sons, Inc.

Chicago Style (17th ed.) Citation

Reinhardt, Karen A., and Richard F. Reidy. Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications. 1st edition. Salem, Mass. ; Scrivener ; Hoboken, N.J.: John Wiley & Sons, Inc, 2011.

MLA (9th ed.) Citation

Reinhardt, Karen A., and Richard F. Reidy. Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications. 1st edition. John Wiley & Sons, Inc, 2011.