Computational lithography
A Unified Summary of the Models and Optimization Methods Used in Computational Lithography Optical lithography is one of the most challenging areas of current integrated circuit manufacturing technology. The semiconductor industry is relying more on resolution enhancement techniques (RETs), since th...
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| Formato: | Libro electrónico |
| Idioma: | Inglés |
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Oxford :
Wiley-Blackwell
2010.
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| Edición: | 1st edition |
| Colección: | Wiley series in pure and applied optics.
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| Ver en Biblioteca Universitat Ramon Llull: | https://discovery.url.edu/permalink/34CSUC_URL/1im36ta/alma991009628200706719 |
