Nano-lithography
Lithography is an extremely complex tool - based on the concept of "imprinting" an original template version onto mass output - originally using relatively simple optical exposure, masking, and etching techniques, and now extended to include exposure to X-rays, high energy UV light, and el...
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| Formato: | Libro electrónico |
| Idioma: | Inglés |
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London : Hoboken, N.J. :
ISTE ; Wiley
2011.
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| Edición: | 1st edition |
| Colección: | ISTE
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| Ver en Biblioteca Universitat Ramon Llull: | https://discovery.url.edu/permalink/34CSUC_URL/1im36ta/alma991009628173906719 |
Tabla de Contenidos:
- Ch. 1. X-ray lithography : fundamentals and applications
- ch. 2. NanoImprint lithography
- ch. 3. Lithography techniques using scanning probe microscopy
- ch. 4. Lithography and manipulation based on the optical properties of metal nanostructures
- ch. 5. Patterning with self-assembling block copolymers
- ch. 6. Metrology for lithography.
