Landis, S. (2011). Nano-lithography (1st edition.). ISTE ; Wiley.
Chicago Style (17th ed.) CitationLandis, Stefan. Nano-lithography. 1st edition. London : Hoboken, N.J.: ISTE ; Wiley, 2011.
MLA (9th ed.) CitationLandis, Stefan. Nano-lithography. 1st edition. ISTE ; Wiley, 2011.
Warning: These citations may not always be 100% accurate.