Principles of microelectromechanical systems
The building blocks of MEMS design through closed-form solutions Microelectromechanical Systems, or MEMS, is the technology of very small systems; it is found in everything from inkjet printers and cars to cell phones, digital cameras, and medical equipment. This book describes the principles of M...
| Autor principal: | |
|---|---|
| Formato: | Libro electrónico |
| Idioma: | Inglés |
| Publicado: |
Hoboken, N.J. :
Wiley
c2011.
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| Edición: | 1st edition |
| Materias: | |
| Ver en Biblioteca Universitat Ramon Llull: | https://discovery.url.edu/permalink/34CSUC_URL/1im36ta/alma991009628087006719 |
Tabla de Contenidos:
- Microfabrication
- Statics
- Static behavior of microstructures
- Dynamics
- Fluid dynamics
- Electromagnetics
- Piezoelectric and thermal actuators
- Electrostatic and electromagnetic actuators
- Sensors.
