Microfabrication for industrial applications
This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industr...
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| Formato: | Libro electrónico |
| Idioma: | Inglés |
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Oxford ; Waltham, MA :
William Andrew
2011.
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| Edición: | 1st edition |
| Colección: | Micro and Nano Technologies
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| Ver en Biblioteca Universitat Ramon Llull: | https://discovery.url.edu/permalink/34CSUC_URL/1im36ta/alma991009627972206719 |
