Lithography
Lithography, the fundamental fabrication process of semiconductor devices, plays a critical role in micro- and nano-fabrications and the revolution in high density integrated circuits. This book is the result of inspirations and contributions from many researchers worldwide. Although the inclusion o...
| Other Authors: | , |
|---|---|
| Format: | eBook |
| Language: | Inglés |
| Published: |
Rijeka, Croatia :
IntechOpen
2010
[2010] |
| Subjects: | |
| See on Biblioteca Universitat Ramon Llull: | https://discovery.url.edu/permalink/34CSUC_URL/1im36ta/alma991009437594906719 |
