Nanoparticle engineering for chemical-mechanical planarization fabrication of next-generation nanodevices
In the development of next-generation nanoscale devices, higher speed and lower power operation is the name of the game. Increasing reliance on mobile computers, mobile phone, and other electronic devices demands a greater degree of speed and power. As chemical mechanical planarization (CMP) progres...
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| Formato: | Libro electrónico |
| Idioma: | Inglés |
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[Place of publication not identified] :
Taylor & Francis
2009
2019. |
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| Ver en Biblioteca Universitat Ramon Llull: | https://discovery.url.edu/permalink/34CSUC_URL/1im36ta/alma991009428256006719 |
