Madou, M. J. (2002). Fundamentals of microfabrication: The science of miniaturization (2nd ed.). CRC Press.
Cita Chicago Style (17a ed.)Madou, Marc J. Fundamentals of Microfabrication: The Science of Miniaturization. 2nd ed. Boca Raton [etc.]: CRC Press, 2002.
Cita MLA (9a ed.)Madou, Marc J. Fundamentals of Microfabrication: The Science of Miniaturization. 2nd ed. CRC Press, 2002.
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