Schmitz, J. E. J. (1992). Chemical vapor deposition of tungsten and tungsten silicides: For VLSI/ULSI applications (Reimpr.). Noyes Publications.
Cita Chicago Style (17a ed.)Schmitz, John E. J. Chemical Vapor Deposition of Tungsten and Tungsten Silicides: For VLSI/ULSI Applications. Reimpr. Westwood, NJ: Noyes Publications, 1992.
Cita MLA (9a ed.)Schmitz, John E. J. Chemical Vapor Deposition of Tungsten and Tungsten Silicides: For VLSI/ULSI Applications. Reimpr. Noyes Publications, 1992.
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